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| The FHA-C mini series AC servo actuators are comprised of Harmonic drive® components for precise motion control and super-flat AC servo motors. The body width is less than half of old models and has a large through hole in the center of the shaft through which electric cables, air pipe, and even laser beam can be passed through this hole to simplify the entire structure of the machine and system. |
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• Thin and compact configuration;
• Hollow-shaft construction;
• High torque, high rigidity, high accuracy;
• Built-in high-rigidity support mechanism;
• Availability of a series of multifunctional control units.
Used for:
• Semiconductor manufacturing equipment: for transport robots, inspection tables;
• Liquid crystal manufacturing equipment: for transport robots, inspection tables, sensitizer application roll driving mechanisms;
• Optical machines
• Medical equipment |
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Type: FHA-C mini series |
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Size: 8, 11, 14 |
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Version symbol: C |
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Harmonic Drive®Reduction ratio: 30, 50, 100 |
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Encoder type and resolution |
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• E200: Incremental encoder 2000p/r |
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Connector supplied (standard specification) |
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Input power supply |
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• None: AC100V or AC200V |
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• E: 24V |
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Cable lead-out direction |
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• None: Lateral (standard specification) |
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• K: Rear (option specification) |
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Special specification (Suffix "SP"
is only special specification) |
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| Item/model |
FHA-8C |
FHA-11C |
| Reduction ratio |
- |
30 |
50 |
100 |
30 |
50 |
100 |
| Maximum momentary torque |
N·m |
1.8 |
3.3 |
4.8 |
4.5 |
8.3 |
11 |
| Max. rotational speed |
r/min |
200 |
120 |
60 |
200 |
120 |
60 |
| Torque constant |
100V·200V |
N·m/A |
3.9 |
6.7 |
14 |
3.8 |
6.6 |
13 |
| 24V |
N·m/A |
0.8 |
1.3 |
2.7 |
0.8 |
1.3 |
2.6 |
| Moment of inertia |
kg·m2 |
0.0026 |
0.0074 |
0.029 |
0.0060 |
0.017 |
0.067 |
| Allowable moment load |
N·m |
15 |
40 |
| Moment stiffness |
N·m/rad |
2X104 |
4X104 |
| Uni-directional positional accuracy |
sec |
150 |
120 |
120 |
120 |
90 |
90 |
| Detector resolution *1 |
p/rev |
240,000 |
400,000 |
800,000 |
240,000 |
400,000 |
800,000 |
| Mass |
kg |
0.40 |
0.62 |
| Combined driver |
100V·200V |
HA-655-1orHA-675-1 |
| 24V |
HA-680-4-24 |
| Item/model |
FHA-14C |
| Reduction ratio |
- |
30 |
50 |
100 |
| Maximum momentary torque |
N·m |
9.0 |
18 |
28 |
| Max. rotational speed |
r/min |
200 |
120 |
60 |
| Torque constant |
100V·200V |
N·m/A |
4.2 |
7.2 |
15 |
| 24V |
N·m/A |
0.8 |
1.4 |
2.9 |
| Moment of inertia |
kg·m2 |
0.018 |
0.050 |
0.20 |
| Allowable moment load |
N·m |
75 |
| Moment stiffness |
N·m/rad |
8X104 |
| Uni-directional positional accuracy |
sec |
120 |
90 |
90 |
| Detector resolution *1 |
p/rev |
240,000 |
400,000 |
800,000 |
| Mass |
kg |
1.2 |
| Combined driver |
100V·200V |
HA-655-1or
HA-675-1 |
| 24V |
HA-680-6-24 |
| *1: Delector resolution is calculated by (Motor side resolution) x4x (Reduction ratio) |
| Model |
A ±1 |
øB |
øC h7 |
øD h7
(Output flange) |
øE
(Hollow shaft diameter) |
F |
G ±30 |
Mass(Kg) |
| FHA-8C |
50 |
66 |
49 |
33.5 |
6.2 |
48.5 |
300 |
0.40 |
| FHA-11C |
60 |
80 |
59 |
41 |
8 |
56 |
300 |
0.62 |
| FHA-14C |
75 |
100 |
74 |
52.5 |
13.5 |
66 |
300 |
1.2 |
| Please confirm dimensions and specification with the drawing issued by Harmonic Drive Systems. |
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