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| TheRSF•RKF series is compact and includes high-torque AC servo actuators with high rotational accuracy and flange output combining a speed reducer Hamonic Drive® for precision control and an AC servo motor.This is combined with a dedicated servo driver that fully demonstrates the performance of the RKF·RKF series of implements compact machines and equipment with a high rotational accuracy. |
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• compact and lightweight
• High power
• High positioning and high rotational accuracies
Used for:
• Semiconductor manufacturing systems
• FPD manufacturing systems
• Electromic component insertion machines
• Measurement analytical and test systems |
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Type: RSF series (Shaft output ), RKF series (Flange output) |
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Size: |
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RSF series: 8, 11, 14, 17, 20, 25, 32 |
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RKF series: 20, 25, 32 |
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Version symbol: A |
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Harmonic Drive® Reduction ratio: 50,100 |
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Encoder type E: Incremental encoder |
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Encoder resolution 200: 2000p/rev |
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Special specification (Suffix "SP" is only special specification) |
| Item/model |
RSF-8A |
RSF-11A |
RSF-14A |
| Reduction ratio |
- |
50 |
100 |
50 |
100 |
50 |
100 |
| Rated torque |
N·m |
1.5 |
2.0 |
3.1 |
4.3 |
5.0 |
7.8 |
| Rated rotational speed |
r/min |
60 |
30 |
60 |
30 |
60 |
30 |
| Maximum momentary torque |
N·m |
2.7 |
3.5 |
4.9 |
7.8 |
14 |
20 |
| Moment of inertia |
kg·m2 |
0.0023
|
0.009 |
0.0063 |
0.025 |
0.014 |
0.056 |
| Uni-directional positional accuracy |
sec |
150 |
120 |
120 |
| Detector resolution *1 |
p/rev |
400,000
|
800,000 |
400,000 |
800,000 |
400,000 |
800,000 |
| Mass |
kg |
0.31 |
0.51 |
0.85 |
| Combined driver *2 |
- |
HA-520-1M-100
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HA-520-1N-100 |
HA-520-1P-100 |
| HA-655-1B-100 |
HA-655-1B-100 |
HA-655-1B-100 |
| Item/model |
RSF-17A |
RSF/RKF-20A |
RSF/RKF-25A |
| Reduction ratio |
- |
50 |
100 |
50 |
100 |
50 |
100 |
| Rated torque |
N·m |
9.8
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20 |
19 |
35 |
29 |
59 |
| Rated rotational speed |
r/min |
60 |
30 |
60 |
30 |
60 |
30 |
| Maximum momentary torque |
N·m |
34 |
54 |
56 |
82 |
98 |
157 |
| Moment of inertia |
kg·m2 |
0.047
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0.19 |
0.098 |
0.39 |
0.19 |
0.77 |
| Uni-directional positional accuracy |
sec |
120 |
90 |
90 |
| Detector resolution *1 |
p/rev |
400,000
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800,000 |
400,000 |
800,000 |
400,000 |
800,000 |
| Mass |
kg |
2.1 |
2.9 |
4.7 |
| Combined driver *2 |
- |
HA-520-1R-200
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HA-520-1R-200 |
HA-520-3-200 |
| HA-655-2B-200 |
HA-655-2B-200 |
HA-655-2B-200 |
| Item/model |
RSF/RKF-32A |
| Reduction ratio |
- |
50 |
100 |
| Rated torque |
N·m |
49 |
98 |
| Rated rotational speed |
r/min |
60 |
30 |
| Maximum momentary torque |
N·m |
220 |
330 |
| Moment of inertia |
kg·m2 |
0.67 |
2.7 |
| Uni-directional positional accuracy |
sec |
90 |
| Detector resolution *1 |
p/rev |
400,000
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800,000 |
| Mass |
kg |
8.7 |
| Combined driver *2 |
- |
- |
| HA-655-4B-200 |
*1: Detector resolution is calculated by (Motor shaft resolution) x4x (Reduction ratio)
*2: HA-520 does only position control.
HA-655 does speed control and position control. |
| • RSF-8A, 11A, 14A |
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| Model |
A |
B |
C |
Mass
(kg) |
| RSF-8A |
33 |
137 |
ø28 |
0.31 |
| RSF-11A |
40 |
139.5 |
40 |
0.51 |
| RSF-14A |
50 |
167 |
40 |
0.85 |
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| • RSF-17A |
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| • RSF-20A, 25A, 32A |
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| Model |
A |
B |
C |
D±1 |
øE h7 |
F |
G |
Mass
(kg) |
| RSF-20A |
242 |
48 |
98 |
96 |
85 |
60 |
93 |
2.9 |
| RSF-25A |
288.7 |
60 |
104.7 |
124 |
110 |
60 |
116 |
4.7 |
| RSF-32A |
331 |
80 |
123 |
128 |
130 |
80 |
137 |
8.7 |
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| • RKF-20A, 25A, 32A |
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| Model |
A |
B |
C |
D±1 |
øE h7 |
F |
G |
Mass
(kg) |
| RKF-20A |
180 |
20 |
64 |
96 |
100 |
60 |
108 |
2.9 |
| RKF-25A |
215.5 |
22 |
69.5 |
124 |
120 |
60 |
130 |
5.0 |
| RKF-32A |
241 |
25.5 |
87.5 |
128 |
155 |
80 |
165 |
9.5 |
| Please confirm dimensions and specification with the drawing issued by Harmonic Drive Systems. |
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